ULTRA LOW DIELECTRIC CONSTANT MATERIAL WITH ENHANCED MECHANICAL PROPERTIES

摘要

An ultra low dielectric constant material is disclosed. The ultra-low dielectric constant material comprises a three dimensional random network porous dielectric comprising atoms of Si, C, O, and H. The ultra-low dielectric constant material also comprises a dielectric constant of not more than 2.6. The ultra-low dielectric constant material further comprises a carbon concentration of at least 15% and a content of carbon that is bonded as—CH2-groups, wherein a concentration of carbon is greater than a concentration of carbon in an ultra low dielectric constant material formed by using a single step ultra-violet curing process.