发明名称 |
DIFFERENTIAL TEMPERATURE AND ACCELERATION COMPENSATED PRESSURE TRANSDUCER |
摘要 |
A dual diaphragm pressure transducer, or sensor, with compensation for non-pressure effects is disclosed. The pressure sensor can include two pressure transducers located on separate portions of a chip. The first pressure transducer can be a differential pressure transducer, which produces a signal proportional to one or more applied pressures and includes other non-pressure effects. The second pressure transducer can be sealed in a hermetic chamber and thus can produce a signal proportional only to non-pressure effects. The signals can be combined to produce a signal proportional to the applied pressures with no non-pressure effects. The first and second pressure transducers can be physically and/or electrically isolated to improve sealing between the two pressure transducers and prevent pressure leaks therebetween. |
申请公布号 |
US2011239772(A1) |
申请公布日期 |
2011.10.06 |
申请号 |
US20100751482 |
申请日期 |
2010.03.31 |
申请人 |
KULITE SEMICONDUCTOR PRODUCTS, INC. |
发明人 |
KURTZ ANTHONY D.;NED ALEXANDER A.;STEFANESCU SORIN;KURTZ NORA |
分类号 |
G01L9/06;B23P11/00 |
主分类号 |
G01L9/06 |
代理机构 |
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代理人 |
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主权项 |
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地址 |
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