发明名称 SEMICONDUCTOR DEVICE
摘要 PROBLEM TO BE SOLVED: To improve the performance of a semiconductor device having a nonvolatile memory, and to improve the reliability of the semiconductor device.SOLUTION: In the semiconductor device, a plurality of memory cells each composed of a memory transistor having a floating gate electrode FG and a control transistor connected to the memory transistor in series are arranged in an array shape in X and Y directions on the main surface of a semiconductor substrate. Bit wiring M1B which connects drain regions of the memory transistors of the memory cells arranged in the X direction is provided in the lowest layer of a wiring layer out of a laminated wiring structure formed on the semiconductor substrate so that the bit wiring M1B covers the entire floating gate electrode FG.
申请公布号 JP2011199124(A) 申请公布日期 2011.10.06
申请号 JP20100066111 申请日期 2010.03.23
申请人 RENESAS ELECTRONICS CORP 发明人 YAMAKOSHI HIDEAKI;OKA YASUSHI;OKADA DAISUKE
分类号 H01L21/8247;H01L27/115;H01L29/788;H01L29/792 主分类号 H01L21/8247
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