VERTICALLY-MOVABLE TYPE PROBE CARD, TESTING METHOD, AND TESTING DEVICE

摘要

PROBLEM TO BE SOLVED: To evade damage of a test pad caused by contact of a defective probe needle by a simple mechanism, with respect to a vertically-movable type probe card, testing method and testing device.SOLUTION: The vertically-movable type probe card includes a set of probe needle groups corresponding in number to pads provided on a measuring object, support blocks for supporting the set of probe needle groups, a support member for fitting the plurality of support blocks in such a way as to be movable vertically, and a substrate to which the support member is stuck. Each support block of the probe card is suitable for the support member through a vertical-moving mechanism having a spring member and an engaging member.