发明名称 METHOD FOR ROUGHENING SUBSTRATE AND METHOD FOR MANUFACTURING PHOTOVOLTAIC DEVICE
摘要 <p>Disclosed is a method for roughening a substrate, which includes: a step of forming an etching resistant film on the surface of the substrate; a step of attaching a mesh-like blast mask (3) to the etching resistant film; a step of forming, by blast processing, a fine opening (4) in an etching resistant film region having no blast mask (3) attached thereto; a step of removing the blast mask; a step of performing etching using the etching resistant film having the opening formed therein; and a step of removing the etching resistant film.</p>
申请公布号 WO2011122353(A1) 申请公布日期 2011.10.06
申请号 WO2011JP56311 申请日期 2011.03.16
申请人 MITSUBISHI ELECTRIC CORPORATION;NISHIMURA, KUNIHIKO;MATSUNO, SHIGERU;HIZA, SHUICHI 发明人 NISHIMURA, KUNIHIKO;MATSUNO, SHIGERU;HIZA, SHUICHI
分类号 H01L31/04 主分类号 H01L31/04
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