METHOD FOR ROUGHENING SUBSTRATE AND METHOD FOR MANUFACTURING PHOTOVOLTAIC DEVICE
摘要
<p>Disclosed is a method for roughening a substrate, which includes: a step of forming an etching resistant film on the surface of the substrate; a step of attaching a mesh-like blast mask (3) to the etching resistant film; a step of forming, by blast processing, a fine opening (4) in an etching resistant film region having no blast mask (3) attached thereto; a step of removing the blast mask; a step of performing etching using the etching resistant film having the opening formed therein; and a step of removing the etching resistant film.</p>
申请公布号
WO2011122353(A1)
申请公布日期
2011.10.06
申请号
WO2011JP56311
申请日期
2011.03.16
申请人
MITSUBISHI ELECTRIC CORPORATION;NISHIMURA, KUNIHIKO;MATSUNO, SHIGERU;HIZA, SHUICHI