摘要 |
The present invention provides a transistor, a semiconductor device and a transistor fabrication process that thoroughly ameliorate electric fields in a transistor element. Namely, the transistor includes a semiconductor substrate, incline portions, a gate electrode, side walls, and a source and a drain. The semiconductor substrate includes a protrusion portion at a surface thereof. The incline portions constitute side surface portions of the protrusion portion and are inclined from the bottom to the top of the protrusion portion. The gate electrode is formed on the top of the protrusion portion, with a gate insulation film interposed therebelow. The side walls are formed on the top of the protrusion portion at two side surfaces of the gate electrode and the gate insulation film. The source and the drain each include a low density region and a high-density region.
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