| 摘要 |
PROBLEM TO BE SOLVED: To provide a mother board of an optical element which is inspected easily with high accuracy, and to provide an inspection method of the optical element.SOLUTION: Diffraction patterns 2 are formed on a plurality of spots on a wafer 1A, and each inspection pattern 3 which is larger than one diffraction pattern 2, and on which the same pitch as the diffraction pattern 2 is formed, is formed on mutually separated positions, to thereby constitute the mother board 1. Since an irradiation object of inspection light is formed as the inspection pattern having a larger area than the diffraction pattern, the irradiation object can be aimed surely, even if the diameter of inspection light irradiated from an irradiation part is large, to thereby execute an inspection work easily. Since the inspection patterns are placed plurally on mutually separated positions, proper inspection can be executed by comparing each detection result on the patterns. |
