| 摘要 |
PROBLEM TO BE SOLVED: To provide a generating method of data for drawing a charged particle beam capable of contributing to the more efficiently finding of a cause of an error.SOLUTION: According to a plane coordinates system, first layout data that specify a layout of a circuit pattern 73 are obtained. According to the plane coordinates system, second layout data that specify a layout of a mark 75 for measurement are obtained. According to the plane coordinates system, third layout data that specify a layout of a frame graphic 74 which encloses the mark 75 for measurement are obtained. The circuit pattern 73 is deleted from a region surrounded with the frame graphic 74. The mark 75 for measurement is synthesized with a region surrounded by the frame graphic 74 for the layout of the circuit pattern 73. |
