SUBSTRATE PROCESSING APPARATUS,申请号KR20110006361-传众专利搜索

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发明名称	SUBSTRATE PROCESSING APPARATUS
摘要
申请公布号	KR20110108242(A)	申请公布日期	2011.10.05
申请号	KR20110006361	申请日期	2011.01.21
申请人	TOKYO ELECTRON LIMITED	发明人	HIGASHIJIMA JIRO
分类号	H01L21/302	主分类号	H01L21/302
代理机构		代理人
主权项
地址

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