| 发明名称 |
Photoresist dispenser with nozzle arrangement for cone-shaped spray |
| 摘要 |
A cleaning system which can be integrated into a coater track system for use in the production of semiconductor devices and methods for its use are provided. The cleaning system can include a series of nozzles having assorted configurations and features which provide uniform and efficient rinsing of excess material.
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| 申请公布号 |
US8028709(B2) |
申请公布日期 |
2011.10.04 |
| 申请号 |
US20090351987 |
申请日期 |
2009.01.12 |
| 申请人 |
TEXAS INSTRUMENTS INCORPORATED |
发明人 |
SALINAS ADRIAN;PETERSON JOEL |
| 分类号 |
B08B3/04;B05C11/00;B05C13/00;B05C13/02;B08B3/00;B08B3/12;B08B6/00 |
主分类号 |
B08B3/04 |
| 代理机构 |
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代理人 |
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