| 摘要 |
<p>Disclosed is a delivery system (10) for delivering species to a processing chamber (14) for imparting a desired surface property to one or more large items. The invention comprises a first container (16) for filling with liquid species, a second container (18) for receiving liquid species from the first container, a first flow control means (20) for controlling a volume of liquid species which is allowed to flow from the first container to the second container. Evaporation means (30) for evaporating liquid species in the second container and a second flow control means (38) for controlling flow of evaporated species from the second container to a processing chamber.</p> |
