| 发明名称 |
METHOD OF MANUFACTURING POLYSILICON FILM, SOLAR CELL, AND ELECTRONIC DEVICE |
| 摘要 |
<p><P>PROBLEM TO BE SOLVED: To manufacture a polysilicon film having a high carrier mobility, without the use of an expensive vacuum chamber. <P>SOLUTION: A method of manufacturing a polysilicon film includes a step of coating a substrate with a liquid where at least silicon particles are dispersed, a step of drying the coating liquid and forming a silicon film, a step of and applying thermal annealing treatment for turning the silicon film into a polysilicon film. <P>COPYRIGHT: (C)2011,JPO&INPIT</p> |
| 申请公布号 |
JP2011192908(A) |
申请公布日期 |
2011.09.29 |
| 申请号 |
JP20100059444 |
申请日期 |
2010.03.16 |
| 申请人 |
TOSHIBA CORP |
发明人 |
SAKURAI NAOAKI;KONDO HIROYASU |
| 分类号 |
H01L21/20;G02F1/136;H01L21/336;H01L29/786;H01L31/04 |
主分类号 |
H01L21/20 |
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