CARRIER AND DOUBLE SIDE POLISHING APPARATUS OF WAFER INCLUDING THE SAME,申请号KR20100025575-传众专利搜索

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发明名称	CARRIER AND DOUBLE SIDE POLISHING APPARATUS OF WAFER INCLUDING THE SAME
摘要
申请公布号	KR20110106515(A)	申请公布日期	2011.09.29
申请号	KR20100025575	申请日期	2010.03.23
申请人	LG SILTRON INCORPORATED	发明人	PARK, JAE HYUN;CHO, HEUI DON;MOON, DO MIN
分类号	H01L21/304	主分类号	H01L21/304
代理机构		代理人
主权项
地址

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