SPIN-ON DIELECTRIC METHOD WITH MULTI-STAGE RAMPING TEMPERATURE

摘要

A Spin-On Dielectric (SOD) method with multi stage ramping temperature for coating a dielectric material onto a substrate, comprising the steps of: (a) placing the substrate on a chill plate to decrease the temperature; (b) fixing the chilled substrate on a spinning device; (c) rotating the spinning device to drive the substrate rotating; (d) injecting the dielectric material onto the center of the substrate; (e) spreading the dielectric material on the upper surface of the substrate by spinning; (f) baking the substrate and the dielectric material by a heat plate to achieve multi stages ramping temperature, where the temperature of each stage has a steady state temperature for a predetermined time and the posterior stage has higher temperature than the anterior stage; (g) placing the substrate on the chill plate for cooling down; (h) spreading a film of dielectric material and finishing the coating.