| 摘要 |
PROBLEM TO BE SOLVED: To improve reliability of a test without lowering workability. SOLUTION: An ESD testing apparatus 1 includes an ESD generator 11 for generating electrostatic discharge for a resistance test, ESD waveform measuring device 21, 22 for measuring waveform characteristics of the electrostatic discharge, a counter 23 for counting generation frequency of the electrostatic discharge, and a controller 16 for measuring the waveform characteristics of the electrostatic discharge when the generation frequency reaches a threshold. The controller 16 determines whether the waveform characteristics conform to prescribed standard, and preferably prohibits execution of the resistance test when determined that they do not conform to it. COPYRIGHT: (C)2011,JPO&INPIT
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