| 摘要 |
<P>PROBLEM TO BE SOLVED: To provide a semiconductor manufacturing system that reduces a burden of an operator with superior efficiency, and hardly causes operation mistake, concerning maintenance of a semiconductor manufacturing device using software. <P>SOLUTION: An operation item and a confirmation item for inspection for every inspection item are displayed on a screen in a predetermined inspection (operation) order, and distinction display as to whether these inspection items are automatically executed or they are executed manually is performed. In the case of automatic execution, the inspection item is automatically executed. In the case of manual operation, a screen for receiving an input of an operation item executed or a confirmation result is displayed by pop-up, and by the input thus received, a next inspection item is read out from a next memory, thus the inspection is sequentially executed. <P>COPYRIGHT: (C)2011,JPO&INPIT |
