发明名称 APPARATUS, METHOD, AND LITHOGRAPHY SYSTEM
摘要 <P>PROBLEM TO BE SOLVED: To provide a device including a processor that creates information on an aerial image. <P>SOLUTION: A device 5009 includes an opening 1011, through which light of an aerial image 1008 penetrates; a detector 5114 that detects transmitted light at two or more first relative positions with respect to the opening; a controller 5117 that controls a second relative position of the opening against the aerial image; and a processor that creates information on the aerial image, based on data obtained from the detector at each first relative position by controlling the second position of the opening and on position data on the first relative position. <P>COPYRIGHT: (C)2011,JPO&INPIT
申请公布号 JP2011192998(A) 申请公布日期 2011.09.29
申请号 JP20110055213 申请日期 2011.03.14
申请人 CANON INC 发明人 UNNO YASUYUKI
分类号 H01L21/027 主分类号 H01L21/027
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