LIQUID EJECTING HEAD, METHOD FOR MANUFACTURING THE SAME AND LIQUID EJECTING APPARATUS

摘要

There is provided a liquid ejecting head in which a surface layer of a vibration plate at the side of a flow path formation substrate is formed by an insulating film made of zirconium oxide and a protection film made of a material which is resistant to liquid is provided on a surface of the flow path formation substrate so as to cover wall surfaces of liquid flow paths.