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发明名称
SEMICONDUCTOR DEVICE, METHOD FOR MANUFACTURING SEMICONDUCTOR DEVICE AND GAS FOR PLASMA CVD
摘要
申请公布号
EP1655772(B1)
申请公布日期
2011.09.28
申请号
EP20040771570
申请日期
2004.08.12
申请人
TOKYO ELECTRON LIMITED;ZEON CORPORATION
发明人
KOBAYASHI, YASUO;KAWAMURA, KOHEI;OHMI, TADAHIRO;TERAMOTO, AKINOBU;SUGIMOTO, TATSUYA;YAMADA, TOSHIRO;TANAKA, KIMIAKI
分类号
H01L21/314
主分类号
H01L21/314
代理机构
代理人
主权项
地址
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