发明名称 METHOD OF MANUFATURING TARGET FOR PVD
摘要 <p>The present invention relates to a method for fabricating a CIS-based target for use in depositing an absorption layer of a solar cell. The method comprises: (a) a step of preparing a Cu, In and Se powder with a mole ratio of 1:1:2; (b) a step of stirring the Cu, In and Se powder and metal balls in a vessel to produce a synthesized CIS material by mechanical force; (c) a step of adding Se to the synthesized CIS material, and mixing and compressing the synthesized CIS material using a ball mill to produce a pellet having a shape corresponding to a target; and (d) a step of performing a heat treatment on the thus-produced pellet to produce a final CIS target.</p>
申请公布号 KR101067337(B1) 申请公布日期 2011.09.23
申请号 KR20090077002 申请日期 2009.08.20
申请人 发明人
分类号 H01L21/203;H01L31/042 主分类号 H01L21/203
代理机构 代理人
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