发明名称 METHOD FOR FORMING A THREE-DIMENSIONAL STRUCTURE OF METAL-INSULATOR-METAL TYPE
摘要 A method for forming a capacitive structure in a metal level of an interconnection stack including a succession of metal levels and of via levels, including the steps of: forming, in the metal level, at least one conductive track in which a trench is defined; conformally forming an insulating layer on the structure; forming, in the trench, a conductive material; and planarizing the structure.
申请公布号 US2011227194(A1) 申请公布日期 2011.09.22
申请号 US201113052262 申请日期 2011.03.21
申请人 STMICROELECTRONICS S.A.;INTERNATIONAL BUSINESS MACHINES CORPORATION 发明人 JEANNOT SIMON;TANNHOF PASCAL
分类号 H01L29/92;H01L21/02 主分类号 H01L29/92
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