发明名称 |
Detachable electrostatic chuck having sealing assembly |
摘要 |
A detachable electrostatic chuck is capable of being attached to a pedestal in a process chamber. The chuck comprises an electrostatic puck having a ceramic body with an embedded electrode. The chuck also has a baseplate below the electrostatic puck with a lower surface which is bonded to a sealing assembly comprising a sealing plate and sealing ring. The sealing plate and ring are polished to form a gas-tight seal between the chuck and pedestal to prevent gas leakage from or into this region.
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申请公布号 |
US2008089001(A1) |
申请公布日期 |
2008.04.17 |
申请号 |
US20060549594 |
申请日期 |
2006.10.13 |
申请人 |
APPLIED MATERIALS, INC. |
发明人 |
PARKHE VIJAY D.;TSAI CHENG-TSIUNG;SANSONI STEVEN V. |
分类号 |
H01L21/683;H01R43/00;H02N13/00 |
主分类号 |
H01L21/683 |
代理机构 |
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代理人 |
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主权项 |
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地址 |
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