DESIGNING METHOD OF POSITIONING DEVICE, MANUFACTURING METHOD OF THE POSITIONING DEVICE, THE POSITIONING DEVICE, AND EXPOSURE DEVICE

摘要

PROBLEM TO BE SOLVED: To provide a designing method of a positioning device executing positioning highly accurately, a manufacturing method of the positioning device, the positioning device and an exposure device.

SOLUTION: In the positioning device including an X stage 100 movable in a first direction, a Y stage 200 coupled to the X stage 100 by a coupling part and movable in a second direction relative to the X stage 100, and a motor (not shown) moving the X stage 100 in the first direction, a specification in production of at least one of the X stage 100 and the Y stage 200 of the positioning device is determined based on a relation among a rigid body mode, primary resonance and secondary resonance based on a transfer function indicating a relation between force that the motor (not shown) moves the X stage 100 and the position of the Y stage 200 in the first direction.

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