REGENERATIVE AMPLIFIER, LASER APPARATUS, AND EXTREME ULTRAVIOLET LIGHT GENERATION SYSTEM

摘要

A regenerative amplifier (20) according to one aspect of this disclosure is used in combination with a laser device, and the regenerative amplifier may include: a pair of resonator mirrors (21a, 21b) constituting an optical resonator; a C02 slab amplifier (25) provided between the pair of the resonator mirrors for amplifying a laser beam with a predetermined wavelength outputted from the laser device; and an optical system (26, 27) disposed to configure a multipass optical path (C2) along which the laser beam is reciprocated inside the slab amplifier, the optical system transferring an optical image of the laser beam at a first position (la) as an optical image of the laser beam at a second position (lb).