| 摘要 |
PROBLEM TO BE SOLVED: To improve reliability of connections by preventing an Al hillock and reducing connection resistance without complicating wiring structures of a scanning line and a signal line formed in an active matrix substrate. SOLUTION: In an active matrix type liquid crystal display device including the active matrix substrate 1 wherein a thin film transistor 14 and a pixel part 13 are formed on a transparent insulative substrate 10, a gate electrode 15 and the scanning line 11 connected to it of the thin film transistor 14 have a TiN/Ti/Al structure, a TiN/Al/Ti structure, or a TiN/Ti/Al/Ti structure. Since a Ti film exists in contact with an Al film, occurrence of the Al hillock in the Al film is suppressed. A TiN film exists in the uppermost layer and no transparent conductive film contacts with the upper layer in the TiN film, so that surface corrosion in a scanning line terminal part 22 is suppressed while increase in the connection resistance is suppressed, thereby improving reliability. COPYRIGHT: (C)2011,JPO&INPIT |
