| 摘要 |
PROBLEM TO BE SOLVED: To provide a temperature control system in which a plurality of heaters are arranged in row/column directions through a switch element to attain simplicity of wiring, in which an effect of leaking current from other heater to an arbitrary heater is alleviated. SOLUTION: A plurality of heaters 8i, j which are arranged in a plurality of rows/columns on a hot plate 7 are connected commonly to wirings 9i, 10j for every rows and columns. Each of wirings 9i of respective rows is connected commonly to a one pole side of an AC power source 6 through a switch element 4i. Each of wirings 10j of respective columns is connected commonly to the another pole side of the AC power source 6 through a switch element 5j. An arc pulse output (ignition instruction) is output by an optimal cycle control to the target heaters 8i, j. At the time of renewal of output error accumulationsΣi, j(n) in the optimal cycle control in the target heaters 8i, j, the interference operation amounts MVIi, j(n) are subtracted from the output error accumulationsΣi, j(n). COPYRIGHT: (C)2011,JPO&INPIT
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