| 摘要 |
PROBLEM TO BE SOLVED: To rapidly inspect shape defects in a minute pattern on a magnetic recording medium, formed from patterned media, that is an object of inspection. SOLUTION: In a patterned media defect inspection method, detected spectral waveform data is compared with standard-sample spectral reflectance waveform data, which is stored in a database and the pattern-shape of which is known, and defects are detected. The type of the defects is determined on the basis of the disparity, for each detected wavelength, between the spectral waveform data of the detected defects, and the standard-sample spectral reflectance waveform data. COPYRIGHT: (C)2011,JPO&INPIT |
