发明名称 GROUP-III NITRIDE SEMICONDUCTOR LASER DEVICE, AND METHOD FOR FABRICATING GROUP-III NITRIDE SEMICONDUCTOR LASER DEVICE
摘要 Provided is a group-III nitride semiconductor laser device with a laser cavity of high lasing yield, on a semipolar surface of a support base in which the c-axis of a hexagonal group-III nitride is tilted toward the m-axis. First and second fractured faces 27, 29 to form the laser cavity intersect with an m-n plane. The group-III nitride semiconductor laser device 11 has a laser waveguide extending in a direction of an intersecting line between the m-n plane and the semipolar surface 17a. For this reason, it is feasible to make use of emission by a band transition enabling the low threshold current. In a laser structure 13, a first surface 13a is opposite to a second surface 13b. The first and second fractured faces 27, 29 extend from an edge 13c of the first surface 13a to an edge 13d of the second surface 13b. The fractured faces are not formed by dry etching and are different from conventionally-employed cleaved facets such as c-planes, m-planes, or a-planes.
申请公布号 US2011228804(A1) 申请公布日期 2011.09.22
申请号 US20100836170 申请日期 2010.07.14
申请人 SUMITOMO ELECTRIC INDUSTRIES, LTD. 发明人 YOSHIZUMI YUSUKE;TAKAGI SHIMPEI;ENYA YOHEI;KYONO TAKASHI;ADACHI MASAHIRO;UENO MASAKI;SUMITOMO TAKAMICHI;TOKUYAMA SHINJI;KATAYAMA KOJI;NAKAMURA TAKAO;IKEGAMI TAKATOSHI
分类号 H01S5/30;H01L33/02 主分类号 H01S5/30
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