发明名称 Aluminum nitride sintered product, method for producing the same, and electrostatic chuck including the same
摘要 A method for producing an aluminum nitride sintered product according to the present invention includes the steps of (a) preparing a powder mixture that contains AlN, 2 to 10 parts by weight of Eu2O3 with respect to 100 parts by weight of AlN, Al2O3 such that a molar ratio of Al2O3 to Eu2O3 is 2 to 10, and TiO2 such that a molar ratio of TiO2 to Al2O3 is 0.05 to 1.2, but not Sm; (b) producing a compact from the powder mixture; and (c) firing the compact by subjecting the compact to hot-press firing in a vacuum or in an inert atmosphere.
申请公布号 US8022001(B2) 申请公布日期 2011.09.20
申请号 US20090618901 申请日期 2009.11.16
申请人 NGK INSULATORS, LTD. 发明人 TERATANI NAOMI;HAYASE TORU;KATSUDA YUJI
分类号 C04B35/581 主分类号 C04B35/581
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