VERTICAL HEAT TREATMENT APPARATUS AND METHOD FOR COOLING THE APPARATUS,申请号KR20110016384-传众专利搜索

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发明名称	VERTICAL HEAT TREATMENT APPARATUS AND METHOD FOR COOLING THE APPARATUS
摘要
申请公布号	KR20110102168(A)	申请公布日期	2011.09.16
申请号	KR20110016384	申请日期	2011.02.24
申请人	TOKYO ELECTRON LIMITED	发明人	KOBAYASHI MAKOTO
分类号	H01L21/22;H01L21/205;H01L21/324	主分类号	H01L21/22
代理机构		代理人
主权项
地址

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