发明名称 |
IGNITION APPARATUS FOR ARC SOURCES |
摘要 |
The present invention relates to an ignition device for igniting a high-current discharge of an electrical arc evaporator in a vacuum coating system. Ignition is performed by means of mechanically closing and opening a contact between the cathode and the anode. Contact is established by means of an ignition finger that can move on a forced path. On account of the forced path, the ignition finger can be moved by means of a simple mechanical drive to a park position, which is protected against coating, and said ignition finger can also be used to ignite a second target. |
申请公布号 |
US2011220495(A1) |
申请公布日期 |
2011.09.15 |
申请号 |
US200913127489 |
申请日期 |
2009.10.08 |
申请人 |
OERLIKON TRADING AG, TRUBBACH |
发明人 |
KRASSNITZER SIEGFRIED;GSTOEHL OLIVER;HAGMANN JUERG |
分类号 |
C23C14/32;C23C14/34 |
主分类号 |
C23C14/32 |
代理机构 |
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代理人 |
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主权项 |
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地址 |
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