| 发明名称 |
FRAME FOR LARGE PELLICLE AND LARGE PELLICLE |
| 摘要 |
<p>Disclosed is a frame for a large pellicle wherein handleability is satisfactory and occurrence of an air path is suppressed when used. In the frame for a large pellicle stretching and supporting a large pellicle film so as to cover the opening section, a frame section forming the rim of the opening section comprises junctions of at least three places along the axial direction of the frame section.</p> |
| 申请公布号 |
WO2011111801(A1) |
申请公布日期 |
2011.09.15 |
| 申请号 |
WO2011JP55712 |
申请日期 |
2011.03.10 |
| 申请人 |
ASAHI KASEI E-MATERIALS CORPORATION;MURAMOTO INDUSTRY CO.,LTD.;KITAJIMA SHINTARO;TANI NORIKO;MATSUE HIROJI;YAMANAKA YUKIYA;IWAKURA SEIJI |
发明人 |
KITAJIMA SHINTARO;TANI NORIKO;MATSUE HIROJI;YAMANAKA YUKIYA;IWAKURA SEIJI |
| 分类号 |
G03F1/64 |
主分类号 |
G03F1/64 |
| 代理机构 |
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代理人 |
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