发明名称 PROCESS FOR FABRICATING AN INTEGRATED CIRCUIT INCLUDING A METAL-INSULATOR-METAL CAPACITOR AND CORRESPONDING INTEGRATED CIRCUIT
摘要 An integrated circuit is fabricated by producing metallization levels in insulating regions, the insulating region being formed of a first material having a first dielectric constant. At least one metal-insulator-metal capacitor is formed by providing metal electrodes in the metallization level, and locally replacing the first material, which is located between the metal electrodes, with a second material having a second dielectric constant greater than the first dielectric constant.
申请公布号 US2011221035(A1) 申请公布日期 2011.09.15
申请号 US201113034373 申请日期 2011.02.24
申请人 STMICROELECTRONICS S.A. 发明人 JEANNOT SIMON;MARTY MICHEL;GIRAUDIN JEAN-CHRISTOPHE
分类号 H01L29/92;H01L21/02 主分类号 H01L29/92
代理机构 代理人
主权项
地址