发明名称 |
RADIATION-SENSITIVE RESIN COMPOSITION, SPACER AND PROTECTIVE FILM OF DISPLAY ELEMENT, AND FORMING METHODS THEREOF |
摘要 |
<P>PROBLEM TO BE SOLVED: To provide a radiation-sensitive resin composition capable of being coated in slit coating at a high speed, obtaining a pattern-like thin film having desired pattern size even in a low exposure amount and superior in strength and being developed in a short time period. <P>SOLUTION: The radiation-sensitive resin composition containing (A) an alkali soluble resin, (B) a polymerizable unsaturated compound, and (C) a radiation-sensitive polymerization initiator contains (B-1) at least one (meth)acrylate compound selected from a compound group expressed in the following general formula (1) and (B-2) a (meth)acrylate compound having a carboxyl group of 100 or more of molecular weight as (B) the polymerizable unsaturated compound. <P>COPYRIGHT: (C)2011,JPO&INPIT |
申请公布号 |
JP2011180478(A) |
申请公布日期 |
2011.09.15 |
申请号 |
JP20100046206 |
申请日期 |
2010.03.03 |
申请人 |
JSR CORP |
发明人 |
MATSUDA KENTARO;ICHINOHE DAIGO |
分类号 |
G03F7/027;C08F2/44;C08F265/06;G02F1/1339;G03F7/033;G03F7/40;H01L21/027 |
主分类号 |
G03F7/027 |
代理机构 |
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代理人 |
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主权项 |
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地址 |
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