| 摘要 |
PROBLEM TO BE SOLVED: To provide a droplet ejection apparatus capable of efficiently treating a workpiece with a simple structure without sacrificing image quality. SOLUTION: The droplet ejection apparatus that removes/feeds a workpiece W alternately in a first workpiece-removing/feeding area 14a and a second workpiece-removing/feeding area 14b each deviated from an imaging area 11 to either outside thereof in the moving direction of the workpiece W, and carries out ejection inspection in an inspection area 13 disposed between the imaging area 11 and the first workpiece-removing/feeding area 14a, is characterized by including a first workpiece stage 22a and a second workpiece stage 22b, an inspection stage 52 disposed between the first workpiece stage 22a and the second workpiece stage 22b to receive inspection ejection from functional-droplet ejection heads 44, an image-recognizing method 6 of recognizing the image of the inspection stage 52, and a stage-moving device 2 of moving the first workpiece stage 22a between the imaging area 11 and the first workpiece-removing/feeding area 14a, of moving the second workpiece stage 22b between the imaging area 11 and the second workpiece-removing/feeding area 14b, and of moving the inspection stage 52 between the inspection area 13 and the imaging area 11. COPYRIGHT: (C)2011,JPO&INPIT
|
