Si NANOWIRE IN WHICH ZERO-DIMENSIONAL STRUCTURE IS SCATTERED IN ONE-DIMENSIONAL STRUCTURE AND METHOD FOR PRODUCING THE SAME

摘要

PROBLEM TO BE SOLVED: To provide a silicon nanowire in which spherical silicon nanocrystals are scattered internally and which can be used as a luminescent material. SOLUTION: The silicon nanowire is obtained by implanting O2+ions into a crystalline silicon nanowire of a one-dimensional structure, depositing silicon nanocrystals within the nanowire by annealing the nanowire in an inert gas atmosphere, and carrying out hydrogen plasma treatment with heating. COPYRIGHT: (C)2011,JPO&INPIT