| 摘要 |
PROBLEM TO BE SOLVED: To solve the following problem in a measuring device and a measuring method for measuring a surface shape of an object surface: measurement accuracy degrades if a measurement object range is extended by adding an optical system for displacing light beams. SOLUTION: This measuring device includes: a projection section for projecting light beams towards the object surface; an identification section for identifying a local shape of the object surface by receiving the light beams reflected by the object surface; a side-by-side advancing section for advancing the light beams abreast while maintaining the projection angle of the light beams; a calculation section for storing local shapes identified by the identification section successively with the side-by-side advancing of the light beams, and calculating a continuous shape of the object surface; a change section for changing the projection angle of the light beams; and a control section for allowing the identification section to project light beams at a second angle to the position of projection at the first angle to the object surface, and identify the local shape to the object surface by a first angle, and to identify a local shape at the projection position again, when the change section changes the projection angle from the first angle to the second angle. COPYRIGHT: (C)2011,JPO&INPIT |
