CONTACTOR, TEST DEVICE FOR SEMICONDUCTOR APPARATUS, AND METHOD FOR MANUFACTURING SEMICONDUCTOR APPARATUS

摘要

PROBLEM TO BE SOLVED: To increase test reliability, concerning a contactor, a test device for a semiconductor apparatus, and a method for manufacturing the semiconductor apparatus.

SOLUTION: A contactor 9 includes a contactor base material 1 including a first material and a conductor film 10a including a second material. The conductor film is formed only on a contact surface 1b with an electrode 31 of a semiconductor apparatus 30 at a tip 1a of the contactor base material 1.

COPYRIGHT: (C)2011,JPO&INPIT