| 摘要 |
<p><P>PROBLEM TO BE SOLVED: To provide a method for manufacturing a solar cell improving photoelectric conversion efficiency by enlarging the grain sizes in the direction of the thickness of an i-layer to reduce grain boundaries, thereby preventing recombination of carriers and activating the dopant at the same time. <P>SOLUTION: This solar cell is composed by sequentially laminating, on an insulating substrate 11, at least a first transparent electrode 12, polycrystalline silicon layers in a pin structure or a nip structure, and a second transparent electrode 16. In the solar cell, oxygen atoms≥5×10<SP>19</SP>/cm<SP>3</SP>are included between any of i-type polycrystalline silicon layers and a p-type silicon layer or an n-type silicon layer adjacent to the side close to the insulating substrate 11 relative to the i-type polycrystalline silicon layer. <P>COPYRIGHT: (C)2011,JPO&INPIT</p> |
