| 摘要 |
PROBLEM TO BE SOLVED: To provide a surface inspection device, capable of correcting an output value of an optical detector without needing a standard sample by inspecting a correction value, by driving the optical detector, using metered correction applied voltage calculated based on photoelectron multiplication factor. SOLUTION: In the surface inspection device, photoelectron multiplication factors of each of the optical detectors 8a-8c are measured, and a control unit 11 calculates a correction applied voltage based on the measured photoelectron multiplication factors. The optical detectors 8a-8c are driven using the correction applied voltage calculated, and correction values are inspected for the detectors 8a-8c built in the surface inspection device, respectively. Thereby, the surface inspection device for correcting output values of the optical detectors can be achieved without needing a standard sample. COPYRIGHT: (C)2011,JPO&INPIT
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