发明名称 MAGNETIC HEAD INSPECTION METHOD AND MAGNETIC HEAD MANUFACTURING METHOD
摘要 A magnetic head inspection method is provided with the step that an area smaller than a half of a scanning and measurement area of a magnetic probe in a cantilever unit of the MFM is set as a scanning and measurement area on a surface of a recording portion of the magnetic head that is scanned by the AFM, so as to greatly reduce the inspection time (tact time) of the AFM.
申请公布号 US2011225684(A1) 申请公布日期 2011.09.15
申请号 US201113024589 申请日期 2011.02.10
申请人 HITACHI HIGH-TECHNOLOGIES CORPORATION 发明人 NAKAGOMI TSUNEO;MATSUSITA NORIMITSU
分类号 G01Q60/54;G01Q60/50 主分类号 G01Q60/54
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