| 摘要 |
PROBLEM TO BE SOLVED: To achieve electrical connection and incidence of light having a large numerical aperture even to a miniaturized or surface mounted DUT by using an optical material having a large diameter that passes through a light as a member that pushes DUT to a stage, thereby allowing to use without being limited by the reduction of light quantity or size of a light source and to measure electric characteristics and optical characteristics and to perform external observation. SOLUTION: An optical element inspection tool includes the stage for measuring characteristics of DUT in which an optical element is encapsulated, a guide part for positioning the DUT, and an optical member for pushing the DUT to the stage and contacting to the DUT, and having a diameter so as to expose the DUT. COPYRIGHT: (C)2011,JPO&INPIT
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