| 摘要 |
PROBLEM TO BE SOLVED: To provide a technology for detecting defects with high accuracy, or a technology for supporting defect detection, regardless of a surface shape of an inspection object to be subjected to visual inspection. SOLUTION: The surface of the inspection object is divided until being settled in the range of a prescribed curvature, and images are acquired in each divided domain. Namely, even if the surface of the inspection object is a curved surface having unequal curvatures, imaging is performed in a unit assumable approximately as a plane. Further, the acquired image is subjected to image processing to detect a defect. A discrimination method by a threshold is used for defect detection as hitherto. COPYRIGHT: (C)2011,JPO&INPIT
|
