| 摘要 |
A silicon interposer 30 being held between a wiring board 40 and a semiconductor element 60 to electrically connect the wiring board 40 to the semiconductor element 60, wherein through-hole electrodes 17 for electrically connecting the wiring board 40 to the semiconductor elements 60 are each formed of a base section and a buffer section, and the buffer section is formed of a conductive material having an elastic coefficient lower than that of the conductive material of the base section, and a semiconductor device package 50 and a semiconductor device 70 incorporating the silicon interposer 30. |
