WINDING VACUUM FILM FORMING PROCESS AND APPARATUS,申请号EP20070831980-传众专利搜索

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发明名称	WINDING VACUUM FILM FORMING PROCESS AND APPARATUS
摘要
申请公布号	EP2107132(B1)	申请公布日期	2011.09.14
申请号	EP20070831980	申请日期	2007.11.16
申请人	ULVAC, INC.	发明人	HIRONO, TAKAYOSHI;NOMURA, TSUNEHITO;TADA, ISAO;NAKATSUKA, ATSUSHI
分类号	C23C14/00;C23C14/56	主分类号	C23C14/00
代理机构		代理人
主权项
地址

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