| 发明名称 |
PROCEDURE FOR PRODUCTION OF NANO STRUCTURED GRADIENT OXIDE COATING OF CATALYTIC MATERIAL BY METHOD OF MAGNETRON SPUTTERING |
| 摘要 |
FIELD: metallurgy. ^ SUBSTANCE: prepared metal substrate is preliminary heated in vacuum to temperature 400-450C and sputtered with metal composition of system (Ti-Ru), (Ti-Ru-Ir), (Zr-Ru) in medium of plasma generating gas argon and reaction gas oxygen by magnetron method. Pressure of argon is maintained constant during whole process of sputtering. Also, partial pressure of oxygen is changed according to linear law from 0 to 810-2 Pa during 10 min; at stabilised pressure of oxygen the said metal composition is sputtered to specified thickness of coating. ^ EFFECT: increased strength of cohesion of coating with substrate and mechanical strength of coating proper. ^ 1 tbl, 2 ex |
| 申请公布号 |
RU2428516(C2) |
申请公布日期 |
2011.09.10 |
| 申请号 |
RU20090138176 |
申请日期 |
2009.10.15 |
| 申请人 |
FEDERAL'NOE GOSUDARSTVENNOE UNITARNOE PREDPRIJATIE "TSENTRAL'NYJ NAUCHNO-ISSLEDOVATEL'SKIJ INSTITUTKONSTRUKTSIONNYKH MATERIALOV "PROMETEJ" (FGUP "TSNII KM "PROMETEJ");ROSSIJSKAJA FEDERATSIJA, OT IMENI KOTOROJ VYSTUPAET MINISTERSTVO PROMYSHLENNOSTI I TORGOVLI ROSSIJSKOJ FEDERATSII (MINPROMTORG ROSSII) |
发明人 |
VASIL'EV ALEKSEJ FILIPPOVICH;TARAKANOVA TAT'JANA ANDREEVNA;KORKINA MARGARITA ALEKSANDROVNA;BORIMSKIJ VJACHESLAV ANATOL'EVICH;PRUDNIKOV IGOR' STANISLAVOVICH;FARMAKOVSKIJ BORIS VLADIMIROVICH;BYSTROV RUSLAN JUR'EVICH;BEREZHKO ANATOLIJ IVANOVICH |
| 分类号 |
B82B3/00;C23C8/12;C23C14/35 |
主分类号 |
B82B3/00 |
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