MICRO ELECTROMECHANICAL SYSTEMS (MEMS) HAVING A GAP STOP AND METHOD THEREFOR

摘要

A method of forming a micro-electromechanical system (MEMS) (10) includes providing a cap substrate (52), providing a support substrate (12), depositing a conductive material (22) over the support substrate, patterning the conductive material to form a gap stop (40, 44) and a contact, wherein the gap stop is separated form the contact by an opening (36, 38), forming a bonding material (58) over the contact and in the opening, wherein the gap stop and the contact prevent the bonding material from extending outside the opening, and attaching the cap substrate to the support substrate by the step of forming the bonding material. In addition, the structure is described.