| 摘要 |
<p><P>PROBLEM TO BE SOLVED: To provide a shape measuring device capable of measuring the position relation of edges at ends of a measured tool correctly, while imaging edge imageries clearly and exactly to permit numerical processing. <P>SOLUTION: The shape measuring device 9 includes a light source module 11 emitting parallel light, an objective lens 23 provided along the optical axis 16 of parallel light emitted from the light source module 11, a projector lens 24 having confocal with the objective lens, a lens barrel 13 including a projection optical system with anti-pinhole filter 25 arranged at the confocal to shade light of zeroth-order light among the incident lights, an optical path shifting means connecting both a light beam separator 33 forcing light flux to translate parallel without changing a direction of light flux to divide each other with a light coupler 34 symmetrically to a reference plane including the optical axis 16, and an imaging element so as to image the imageries projected by a projection optical system, resulted in possible measurement of correct shape even for a large work 17. <P>COPYRIGHT: (C)2011,JPO&INPIT</p> |
