发明名称 SPUTTERING TARGET FOR FORMING MAGNETIC RECORDING MEDIUM FILM AND METHOD FOR MANUFACTURING THE SAME
摘要 PROBLEM TO BE SOLVED: To provide a sputtering target for forming a magnetic recording medium film with which high leakage magnetic flux density is obtained and sputtering efficiency is improved, and a method for manufacturing the same. SOLUTION: The target has a composition including 0.5-15 mol% of a nonmagnetic oxide, 4-20 mol% of Cr, 5-25 mol% of Pt, and a remainder composed of Co and inevitable impurities, wherein a structure of the target is a composite structure composed of a first phase 1 including the nonmagnetic oxide dispersed in a nonmagnetic alloy phase at least containing Co, Cr, and Pt, and a second phase 2 including the nonmagnetic oxide dispersed in a ferromagnetic alloy phase at least containing Co. COPYRIGHT: (C)2011,JPO&INPIT
申请公布号 JP2011175725(A) 申请公布日期 2011.09.08
申请号 JP20110013511 申请日期 2011.01.25
申请人 MITSUBISHI MATERIALS CORP 发明人 IGARASHI KAZUNORI;WATANABE MUNEAKI
分类号 G11B5/851;C22C1/05;C22C19/07;C22C32/00;C23C14/34;G11B5/64 主分类号 G11B5/851
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