METHOD FOR MANUFACTURING PIEZOELECTRIC FILM,申请号US201113037600-传众专利搜索

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发明名称	METHOD FOR MANUFACTURING PIEZOELECTRIC FILM
摘要	A method for manufacturing a piezoelectric film includes: forming a piezoelectric precursor film including Bi, Fe, Mn, Ba, and Ti; and obtaining a piezoelectric film preferentially oriented with the (110) plane by crystallizing the piezoelectric precursor film.
申请公布号	US2011217454(A1)	申请公布日期	2011.09.08
申请号	US201113037600	申请日期	2011.03.01
申请人	SEIKO EPSON CORPORATION	发明人	HAMADA YASUAKI
分类号	H01L41/187;B05D5/12	主分类号	H01L41/187
代理机构		代理人
主权项
地址

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